Issued Patents 2011
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8012794 | Capping layers for metal oxynitride TFTS | — | 2011-09-06 |
| 7994508 | Thin film transistors using thin film semiconductor materials | — | 2011-08-09 |
| 7988470 | Methods of fabricating metal oxide or metal oxynitride TFTs using wet process for source-drain metal etch | — | 2011-08-02 |
| 7972467 | Apparatus and method to confine plasma and reduce flow resistance in a plasma reactor | Kallol Bera, James D. Carducci, Daniel J. Hoffman, Steven C. Shannon, Douglas A. Buchberger, Jr. | 2011-07-05 |
| 7955986 | Capacitively coupled plasma reactor with magnetic plasma control | Daniel J. Hoffman, Matthew L. Miller, Jang-Gyoo Yang, Heeyeop Chae, Michael Barnes +1 more | 2011-06-07 |
| 7927713 | Thin film semiconductor material produced through reactive sputtering of zinc target using nitrogen gases | — | 2011-04-19 |
| 7879698 | Integrated process system and process sequence for production of thin film transistor arrays using doped or compounded metal oxide semiconductor | — | 2011-02-01 |