Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8048806 | Methods to avoid unstable plasma states during a process transition | Michael Kutney, Daniel J. Hoffman, Gerardo Delgadino, Ezra Robert Gold, Ashok Sinha +2 more | 2011-11-01 |
| 8034180 | Method of cooling a wafer support at a uniform temperature in a capacitively coupled plasma reactor | Paul Brillhart, Richard Fovell, Douglas A. Buchberger, Jr., Kallol Bera, Daniel J. Hoffman | 2011-10-11 |
| 8021521 | Method for agile workpiece temperature control in a plasma reactor using a thermal model | Douglas A. Buchberger, Jr., Paul Brillhart, Richard Fovell, Hamid Tavassoli, Kallol Bera +5 more | 2011-09-20 |
| 8011381 | Balanced purge slit valve | Jacob Newman | 2011-09-06 |
| 8012304 | Plasma reactor with a multiple zone thermal control feed forward control apparatus | Paul Brillhart, Richard Fovell, Hamid Tavassoli, Douglas A. Buchberger, Jr., Kallol Bera +1 more | 2011-09-06 |
| 7988872 | Method of operating a capacitively coupled plasma reactor with dual temperature control loops | Paul Brillhart, Richard Fovell, Douglas A. Buchberger, Jr., Kallol Bera, Daniel J. Hoffman +4 more | 2011-08-02 |