Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6924223 | Method of forming a metal layer using an intermittent precursor gas flow process | Hideaki Yamasaki, Tsukasa Matsuda, Atsushi Gomi, Tatsuo Hatano, Mitsuhiro Tachibana +6 more | 2005-08-02 |
| 6853953 | Method for characterizing the performance of an electrostatic chuck | Jozef Brcka, Bill D. Jones, Jeffrey Jay Long, Bill Oliver, Charles Tweed | 2005-02-08 |