Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6946054 | Modified transfer function deposition baffles and high density plasma ignition therewith in semiconductor processing | — | 2005-09-20 |
| 6853953 | Method for characterizing the performance of an electrostatic chuck | Bill D. Jones, Gert Leusink, Jeffrey Jay Long, Bill Oliver, Charles Tweed | 2005-02-08 |