Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6853953 | Method for characterizing the performance of an electrostatic chuck | Jozef Brcka, Bill D. Jones, Gert Leusink, Bill Oliver, Charles Tweed | 2005-02-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6853953 | Method for characterizing the performance of an electrostatic chuck | Jozef Brcka, Bill D. Jones, Gert Leusink, Bill Oliver, Charles Tweed | 2005-02-08 |