Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6924223 | Method of forming a metal layer using an intermittent precursor gas flow process | Hideaki Yamasaki, Tsukasa Matsuda, Atsushi Gomi, Tatsuo Hatano, Koumei Matsuzava +6 more | 2005-08-02 |
| 6913996 | Method of forming metal wiring and semiconductor manufacturing apparatus for forming metal wiring | Hideaki Yamasaki, Kazuya Okubo, Kenji Suzuki, Yumiko Kawano | 2005-07-05 |
| 6875603 | Apparatus for detecting biopolymers and cartridge | Keiichi Sato, Toshiki Morita, Motonao Nakao | 2005-04-05 |