Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6966936 | Processing system, evacuating system for processing system, low-pressure CVD system, and evacuating system and trapping device for low-pressure CVD system | Yumiko Kawano, Kenichi Kubo, Susumu Arima | 2005-11-22 |
| 6924223 | Method of forming a metal layer using an intermittent precursor gas flow process | Tsukasa Matsuda, Atsushi Gomi, Tatsuo Hatano, Mitsuhiro Tachibana, Koumei Matsuzava +6 more | 2005-08-02 |
| 6919268 | Method of manufacturing a WN contact plug | Yumiko Kawano | 2005-07-19 |
| 6913996 | Method of forming metal wiring and semiconductor manufacturing apparatus for forming metal wiring | Mitsuhiro Tachibana, Kazuya Okubo, Kenji Suzuki, Yumiko Kawano | 2005-07-05 |
| 6846711 | Method of making a metal oxide capacitor, including a barrier film | Yumiko Kawano | 2005-01-25 |