Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979522 | Method for exposing at least one or at least two semiconductor wafers | Heiko Hommen, Ralf Otto, Thorsten Schedel, Thomas Fischer | 2005-12-27 |
| 6980304 | Method for measuring a characteristic dimension of at least one pattern on a disc-shaped object in a measuring instrument | Oliver Broermann, Diana Mattiza | 2005-12-27 |
| 6908775 | Method for performing an alignment measurement of two patterns in different layers on a semiconductor wafer | Rolf Heine, Thorsten Schedel | 2005-06-21 |
| 6892108 | Method for adjusting processing parameters of at least one plate-shaped object in a processing tool | Karl Mautz, Thorsten Schedel | 2005-05-10 |