Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6980304 | Method for measuring a characteristic dimension of at least one pattern on a disc-shaped object in a measuring instrument | Diana Mattiza, Sebastian Schmidt | 2005-12-27 |
| 6897422 | Measuring configuration and method for measuring a critical dimension of at least one feature on a semiconductor wafer | — | 2005-05-24 |