Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6914006 | Wafer scribing method and wafer scribing device | Martin Peiter, Eckhard Marx | 2005-07-05 |
| 6902986 | Method for defining alignment marks in a semiconductor wafer | John Maltabes, Alain Charles, Joseph Petrucci | 2005-06-07 |
| 6895294 | Assembly comprising a plurality of mask containers, manufacturing system for manufacturing semiconductor devices, and method | Alain Charles, John Maltabes, Ralf Schuster | 2005-05-17 |
| 6892108 | Method for adjusting processing parameters of at least one plate-shaped object in a processing tool | Sebastian Schmidt, Thorsten Schedel | 2005-05-10 |
| 6881264 | Configuration and a method for reducing contamination with particles on a substrate in a process tool | Mark Hiatt, Ralf Schuster | 2005-04-19 |