Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6895294 | Assembly comprising a plurality of mask containers, manufacturing system for manufacturing semiconductor devices, and method | Karl Mautz, Alain Charles, John Maltabes | 2005-05-17 |
| 6881264 | Configuration and a method for reducing contamination with particles on a substrate in a process tool | Mark Hiatt, Karl Mautz | 2005-04-19 |