Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979522 | Method for exposing at least one or at least two semiconductor wafers | Heiko Hommen, Ralf Otto, Sebastian Schmidt, Thomas Fischer | 2005-12-27 |
| 6908775 | Method for performing an alignment measurement of two patterns in different layers on a semiconductor wafer | Rolf Heine, Sebastian Schmidt | 2005-06-21 |
| 6892108 | Method for adjusting processing parameters of at least one plate-shaped object in a processing tool | Karl Mautz, Sebastian Schmidt | 2005-05-10 |
| 6887722 | Method for exposing a semiconductor wafer | Torsten Seidel | 2005-05-03 |
| 6861331 | Method for aligning and exposing a semiconductor wafer | Martin Rössiger, Jens Stäcker | 2005-03-01 |