Issued Patents 2005
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6969682 | Single workpiece processing system | Paul Z. Wirth, Steven L. Peace, Jon Kuntz, Scott Bruner | 2005-11-29 |
| 6930046 | Single workpiece processing system | Eric Lund, Coby Scott GROVE, Steven L. Peace, Paul Z. Wirth, Scott Bruner +1 more | 2005-08-16 |
| 6921468 | Electroplating system having auxiliary electrode exterior to main reactor chamber for contact cleaning operations | Lyndon Graham, Thomas Ritzdorf, Jeffrey I. Turner | 2005-07-26 |
| 6921467 | Processing tools, components of processing tools, and method of making and using same for electrochemical processing of microelectronic workpieces | Steve Eudy, Thomas Ritzdorf, Gregory J. Wilson, Daniel J. Woodruff, Randy Harris +4 more | 2005-07-26 |
| 6916412 | Adaptable electrochemical processing chamber | Daniel J. Woodruff, Steve Eudy, Curtis Weber, Randy Harris | 2005-07-12 |
| 6890415 | Reactor vessel having improved cup, anode and conductor assembly | Daniel J. Woodruff | 2005-05-10 |
| 6881309 | Diffuser with spiral opening pattern for electroplating reactor vessel | Robert A. Weaver, Jerry Simchuk, Raymon F. Thompson | 2005-04-19 |
| 6878955 | Method and apparatus for accessing microelectronic workpiece containers | Randy Harris, Daniel P. Bexten | 2005-04-12 |
| 6869510 | Methods and apparatus for processing the surface of a microelectronic workpiece | Daniel J. Woodruff, Thomas H. Oberlitner, Linlin Chen, John M. Pedersen, Vladimir Zila | 2005-03-22 |
| 6854473 | Method and apparatus for executing plural processes on a microelectronic workpiece at a single processing station | Reed A. Blackburn | 2005-02-15 |
| 6849167 | Electroplating reactor including back-side electrical contact apparatus | Daniel J. Woodruff, Robert W. Batz, Jr., James T. Kuechmann | 2005-02-01 |