Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6936153 | Semiconductor plating system workpiece support having workpiece-engaging electrode with pre-conditioned contact face | — | 2005-08-30 |
| 6921467 | Processing tools, components of processing tools, and method of making and using same for electrochemical processing of microelectronic workpieces | Kyle M. Hanson, Steve Eudy, Gregory J. Wilson, Daniel J. Woodruff, Randy Harris +4 more | 2005-07-26 |
| 6921468 | Electroplating system having auxiliary electrode exterior to main reactor chamber for contact cleaning operations | Lyndon Graham, Kyle M. Hanson, Jeffrey I. Turner | 2005-07-26 |