Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6976822 | End-effectors and transfer devices for handling microelectronic workpieces | James J. Erickson | 2005-12-20 |
| 6921467 | Processing tools, components of processing tools, and method of making and using same for electrochemical processing of microelectronic workpieces | Kyle M. Hanson, Steve Eudy, Thomas Ritzdorf, Gregory J. Wilson, Randy Harris +4 more | 2005-07-26 |
| 6916412 | Adaptable electrochemical processing chamber | Kyle M. Hanson, Steve Eudy, Curtis Weber, Randy Harris | 2005-07-12 |
| 6890415 | Reactor vessel having improved cup, anode and conductor assembly | Kyle M. Hanson | 2005-05-10 |
| 6869510 | Methods and apparatus for processing the surface of a microelectronic workpiece | Kyle M. Hanson, Thomas H. Oberlitner, Linlin Chen, John M. Pedersen, Vladimir Zila | 2005-03-22 |
| 6849167 | Electroplating reactor including back-side electrical contact apparatus | Kyle M. Hanson, Robert W. Batz, Jr., James T. Kuechmann | 2005-02-01 |