Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6881309 | Diffuser with spiral opening pattern for electroplating reactor vessel | Kyle M. Hanson, Jerry Simchuk, Raymon F. Thompson | 2005-04-19 |
| 6861027 | Method and apparatus for processing a microelectronic workpiece including an apparatus and method for executing a processing step at an elevated temperature | Paul R. McHugh, Gregory J. Wilson | 2005-03-01 |