Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6926012 | Method for supercritical processing of multiple workpieces | Frederick P. Layman, Thomas Sutton | 2005-08-09 |
| 6926798 | Apparatus for supercritical processing of a workpiece | Frederick P. Layman, Thomas Sutton | 2005-08-09 |
| 6921456 | High pressure processing chamber for semiconductor substrate | Frederick P. Layman, Thomas Sutton | 2005-07-26 |
| 6905959 | Apparatus and method for depositing superior Ta (N) copper thin films for barrier and seed applications in semiconductor processing | Kaihan Ashtiani, Erich R. Klawuhn, Kwok Fai Lai, Karl B. Levy, J. Patrick Rymer | 2005-06-14 |
| 6890853 | Method of depositing metal film and metal deposition cluster tool including supercritical drying/cleaning module | Paul Schilling | 2005-05-10 |