Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6928746 | Drying resist with a solvent bath and supercritical CO2 | Chantal Arena-Foster, Allan Awtrey, Nicholas Alan Ryza | 2005-08-16 |
| 6924086 | Developing photoresist with supercritical fluid and developer | Chantal Arena-Foster, Allan Awtrey, Nicholas Alan Ryza | 2005-08-02 |
| 6890853 | Method of depositing metal film and metal deposition cluster tool including supercritical drying/cleaning module | Maximilian A. Biberger | 2005-05-10 |