Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6928746 | Drying resist with a solvent bath and supercritical CO2 | Allan Awtrey, Nicholas Alan Ryza, Paul Schilling | 2005-08-16 |
| 6924086 | Developing photoresist with supercritical fluid and developer | Allan Awtrey, Nicholas Alan Ryza, Paul Schilling | 2005-08-02 |