Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6926012 | Method for supercritical processing of multiple workpieces | Maximilian A. Biberger, Thomas Sutton | 2005-08-09 |
| 6926798 | Apparatus for supercritical processing of a workpiece | Maximilian A. Biberger, Thomas Sutton | 2005-08-09 |
| 6921456 | High pressure processing chamber for semiconductor substrate | Maximilian A. Biberger, Thomas Sutton | 2005-07-26 |