Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6977014 | Architecture for high throughput semiconductor processing applications | Craig L. Stevens | 2005-12-20 |
| 6905959 | Apparatus and method for depositing superior Ta (N) copper thin films for barrier and seed applications in semiconductor processing | Kaihan Ashtiani, Maximilian A. Biberger, Erich R. Klawuhn, Kwok Fai Lai, J. Patrick Rymer | 2005-06-14 |
| 6902620 | Atomic layer deposition systems and methods | Thomas R. Omstead | 2005-06-07 |