Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6966952 | Apparatus of depositing thin film with high uniformity | Young-eal Kim, Dong-joon Ma | 2005-11-22 |
| 6964839 | Photosensitive polymer having cyclic backbone and resist composition containing the same | Hyun-Woo Kim, Sang-Gyun Woo, Joo-tae Moon | 2005-11-15 |
| 6897005 | Photosensitive polymer including copolymer of alkyl vinyl ether and resist composition containing the same | Hyun-Woo Kim | 2005-05-24 |
| 6893793 | Photosensitive polymer and chemically amplified photoresist composition containing the same | Dong-won Jung, Si-hyeung Lee, Sook Lee | 2005-05-17 |
| 6849382 | Photosensitive polymer containing silicon and a resist composition using the same | — | 2005-02-01 |
| 6844134 | Photosenseitive polymer having fluorinated ethylene glycol group and chemically amplified resist composition comprising the same | Joo-tae Moon, Sang-Gyun Woo, Kwang-Sub Yoon, Ki Yong Song | 2005-01-18 |