Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6966952 | Apparatus of depositing thin film with high uniformity | Sang-jun Choi, Dong-joon Ma | 2005-11-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6966952 | Apparatus of depositing thin film with high uniformity | Sang-jun Choi, Dong-joon Ma | 2005-11-22 |