Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979256 | Retaining ring with wear pad for use in chemical mechanical planarization | Richard D. Cooper, Paul Fathauer, Angela Mroczek-Petroski, David Perry | 2005-12-27 |
| 6964601 | Method for securing a polishing pad to a platen for use in chemical-mechanical polishing of wafers | Angela Petroski, Richard D. Cooper, Paul Fathauer, David Perry | 2005-11-15 |
| 6899610 | Retaining ring with wear pad for use in chemical mechanical planarization | Richard D. Cooper, Paul Fathauer, Angela Mroczek-Petroski, David Perry | 2005-05-31 |