Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979256 | Retaining ring with wear pad for use in chemical mechanical planarization | Richard D. Cooper, Paul Fathauer, David Perry, James Macey | 2005-12-27 |
| 6899610 | Retaining ring with wear pad for use in chemical mechanical planarization | Richard D. Cooper, Paul Fathauer, David Perry, James Macey | 2005-05-31 |
| 6863774 | Polishing pad for use in chemical-mechanical planarization of semiconductor wafers and method of making same | Richard D. Cooper, Paul Fathauer, David Perry, James J. Petroski | 2005-03-08 |