Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6863774 | Polishing pad for use in chemical-mechanical planarization of semiconductor wafers and method of making same | Richard D. Cooper, Paul Fathauer, Angela Mroczek-Petroski, David Perry | 2005-03-08 |