Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6964601 | Method for securing a polishing pad to a platen for use in chemical-mechanical polishing of wafers | Richard D. Cooper, Paul Fathauer, David Perry, James Macey | 2005-11-15 |
| 6945846 | Polishing pad for use in chemical/mechanical planarization of semiconductor wafers having a transparent window for end-point determination and method of making | Richard D. Copper, Paul Fathauer, David Perry | 2005-09-20 |
| 6875077 | Polishing pad for use in chemical/mechanical planarization of semiconductor wafers having a transparent window for end-point determination and method of making | Richard D. Copper, Paul Fathauer, David Perry | 2005-04-05 |
| 6852020 | Polishing pad for use in chemical—mechanical planarization of semiconductor wafers and method of making same | Richard D. Cooper, Paul Fathauer, Marc A. Yesnik | 2005-02-08 |