Issued Patents 2005
Showing 1–25 of 61 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6977221 | Methods of forming an electrically conductive line | Sujit Sharan | 2005-12-20 |
| 6967154 | Enhanced atomic layer deposition | Shuang Meng, Garo Derderian | 2005-11-22 |
| 6962824 | Method for controlling deposition of dielectric films | Cem Basceri, Dan Gealy | 2005-11-08 |
| 6953743 | Low-resistance contact to silicon having a titanium silicide interface and an amorphous titanium carbonitride barrier layer | Trung T. Doan, Tyler Lowrey | 2005-10-11 |
| 6952051 | Interlevel dielectric structure | Anand Srinivasan, Ravi Iyer | 2005-10-04 |
| 6949827 | Semiconductor device with novel film composition | Garo Derderian | 2005-09-27 |
| 6946357 | Conductive container structures having a dielectric cap | Alan R. Reinberg | 2005-09-20 |
| 6946393 | Small grain size, conformal aluminum interconnects and method for their formation | Wing-Cheong Gilbert Lai | 2005-09-20 |
| 6943107 | Methods of forming a refractory metal silicide | Sujit Sharan | 2005-09-13 |
| 6940172 | Chemical vapor deposition of titanium | Donald L. Westmoreland | 2005-09-06 |
| 6939794 | Boron-doped amorphous carbon film for use as a hard etch mask during the formation of a semiconductor device | Zhiping Yin | 2005-09-06 |
| 6939723 | Method of forming haze-free BST films | Cem Basceri | 2005-09-06 |
| 6939817 | Removal of carbon from an insulative layer using ozone | Li Li | 2005-09-06 |
| 6940112 | Integrated capacitors fabricated with conductive metal oxides | Howard E. Rhodes, Mark Visokay, Tom Graettinger, Dan Gealy, Cem Basceri +1 more | 2005-09-06 |
| 6936539 | Antireflective coating for use during the manufacture of a semiconductor device | Zhiping Yin | 2005-08-30 |
| 6936549 | Chemical vapor deposition using organometallic precursors | Pierre C. Fazan | 2005-08-30 |
| 6935372 | Semiconductor processing reactive precursor valve assembly | Ross S. Dando, Allen Mardian | 2005-08-30 |
| 6930058 | Method of depositing a silicon dioxide comprising layer doped with at least one of P, B and Ge | Chris Hill, Weimin Li | 2005-08-16 |
| 6927067 | Detection devices, methods and systems for gas phase materials | — | 2005-08-09 |
| 6924968 | Haze-free BST films | Cem Basceri | 2005-08-02 |
| 6921708 | Integrated circuits having low resistivity contacts and the formation thereof using an in situ plasma doping and clean | Sujit Sharan | 2005-07-26 |
| 6921728 | Method of reducing carbon incorporation into films produced by chemical vapor deposition involving organic precursor compounds | — | 2005-07-26 |
| 6916374 | Atomic layer deposition methods and atomic layer deposition tools | Trung T. Doan | 2005-07-12 |
| 6916380 | System for depositing a layered film | Haining Yang | 2005-07-12 |
| 6917112 | Conductive semiconductor structures containing metal oxide regions | Cem Basceri | 2005-07-12 |