Issued Patents 2005
Showing 1–25 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6969677 | Methods of forming conductive metal silicides by reaction of metal with silicon | Garo Derderian | 2005-11-29 |
| 6964901 | Methods of forming rugged electrically conductive surfaces and layers | Marsela Pontoh, Thomas M. Graettinger | 2005-11-15 |
| 6962824 | Method for controlling deposition of dielectric films | Dan Gealy, Gurtej S. Sandhu | 2005-11-08 |
| 6958267 | Methods of forming perovskite-type dielectric materials with chemical vapor deposition | — | 2005-10-25 |
| 6952029 | Thin film capacitor with substantially homogenous stoichiometry | — | 2005-10-04 |
| 6939723 | Method of forming haze-free BST films | Gurtej S. Sandhu | 2005-09-06 |
| 6940112 | Integrated capacitors fabricated with conductive metal oxides | Howard E. Rhodes, Mark Visokay, Tom Graettinger, Dan Gealy, Gurtej S. Sandhu +1 more | 2005-09-06 |
| 6924968 | Haze-free BST films | Gurtej S. Sandhu | 2005-08-02 |
| 6917112 | Conductive semiconductor structures containing metal oxide regions | Gurtej S. Sandhu | 2005-07-12 |
| 6908639 | Mixed composition interface layer and method of forming | Gurtej S. Sandhu | 2005-06-21 |
| 6905955 | Methods of forming conductive connections, and methods of forming nanofeatures | Garo Derderian | 2005-06-14 |
| 6900106 | Methods of forming capacitor constructions | Garo Derderian | 2005-05-31 |
| 6896730 | Atomic layer deposition apparatus and methods | Garo Derderian, Gurtej S. Sandhu, Demetrius Sarigiannis | 2005-05-24 |
| 6890596 | Deposition methods | Demetrius Sarigiannis, Garo Derderian, Gurtej S. Sandhu, F. Daniel Gealy, Chris M. Carlson | 2005-05-10 |
| 6888188 | Capacitor constructions comprising perovskite-type dielectric materials and having different degrees of crystallinity within the perovskite-type dielectric materials | — | 2005-05-03 |
| 6887521 | Gas delivery system for pulsed-type deposition processes used in the manufacturing of micro-devices | — | 2005-05-03 |
| 6884718 | Semiconductor manufacturing process and apparatus for modifying in-film stress of thin films, and product formed thereby | — | 2005-04-26 |
| 6884475 | Chemical vapor deposition method for depositing a high k dielectric film | — | 2005-04-26 |
| 6884296 | Reactors having gas distributors and methods for depositing materials onto micro-device workpieces | Gurtej S. Sandhu | 2005-04-26 |
| 6881642 | Method of forming a MIM capacitor with metal nitride electrode | Thomas M. Graettinger | 2005-04-19 |
| 6878602 | Dielectric cure for reducing oxygen vacancies | Gurtej S. Sandhu | 2005-04-12 |
| 6869877 | Integrated capacitors fabricated with conductive metal oxides | Howard E. Rhodes, Mark Visokay, Tom Graettinger, Dan Gealy, Gurtej S. Sandhu +1 more | 2005-03-22 |
| 6861330 | Structures and methods for enhancing capacitors in integrated circuits | Gurtej S. Sandhu | 2005-03-01 |
| 6855971 | Haze-free BST films | Gurtej S. Sandhu | 2005-02-15 |
| 6852593 | Haze-free BST films | Gurtej S. Sandhu | 2005-02-08 |