Issued Patents 2005
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6977230 | Methods of removing material from a semiconductor substrate | Kevin J. Torek | 2005-12-20 |
| 6969677 | Methods of forming conductive metal silicides by reaction of metal with silicon | Cem Basceri | 2005-11-29 |
| 6967154 | Enhanced atomic layer deposition | Shuang Meng, Gurtej S. Sandhu | 2005-11-22 |
| 6951813 | Methods of forming metal-containing layers including a metal bonded to halogens and trialkylaluminum | — | 2005-10-04 |
| 6949827 | Semiconductor device with novel film composition | Gurtej S. Sandhu | 2005-09-27 |
| 6943106 | Methods of fabricating interconnects for semiconductor components including plating solder-wetting material and solder filling | Kyle K. Kirby, Shuang Meng | 2005-09-13 |
| 6936513 | Methods of forming capacitors and electronic devices | F. Daniel Gealy, Chris M. Carlson | 2005-08-30 |
| 6905955 | Methods of forming conductive connections, and methods of forming nanofeatures | Cem Basceri | 2005-06-14 |
| 6902985 | Method of forming a rough (high surface area) electrode from Ti and TiN capacitors and semiconductor devices including same | Gurtej S. Sandhu | 2005-06-07 |
| 6900497 | Integrated circuit with a capacitor comprising an electrode | Vishnu K. Agarwal, F. Daniel Gealy | 2005-05-31 |
| 6900106 | Methods of forming capacitor constructions | Cem Basceri | 2005-05-31 |
| 6897160 | Methods for forming rough ruthenium-containing layers and structures/methods using same | Vishnu K. Agarwal | 2005-05-24 |
| 6896730 | Atomic layer deposition apparatus and methods | Cem Basceri, Gurtej S. Sandhu, Demetrius Sarigiannis | 2005-05-24 |
| 6890596 | Deposition methods | Demetrius Sarigiannis, Cem Basceri, Gurtej S. Sandhu, F. Daniel Gealy, Chris M. Carlson | 2005-05-10 |
| 6891217 | Capacitor with discrete dielectric material | Vishnu K. Agarwal | 2005-05-10 |
| 6890814 | Methods for use in forming a capacitor and structures resulting from same | Gurtej S. Sandhu | 2005-05-10 |
| 6861094 | Methods for forming thin layers of materials on micro-device workpieces | Gurtej S. Sandhu | 2005-03-01 |
| 6861693 | Continuous good step coverage CVD platinum metal deposition | — | 2005-03-01 |
| 6844260 | Insitu post atomic layer deposition destruction of active species | Demetrius Sarigiannis, Shuang Meng | 2005-01-18 |