Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6896730 | Atomic layer deposition apparatus and methods | Garo Derderian, Cem Basceri, Gurtej S. Sandhu | 2005-05-24 |
| 6890596 | Deposition methods | Garo Derderian, Cem Basceri, Gurtej S. Sandhu, F. Daniel Gealy, Chris M. Carlson | 2005-05-10 |
| 6844260 | Insitu post atomic layer deposition destruction of active species | Shuang Meng, Garo Derderian | 2005-01-18 |