Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6971944 | Method and control system for improving CMP process by detecting and reacting to harmonic oscillation | Michael Berman, Steven Reder | 2005-12-06 |
| 6943042 | Method of detecting spatially correlated variations in a parameter of an integrated circuit die | Robert Madge, Kevin Cota | 2005-09-13 |
| 6936920 | Voltage contrast monitor for integrated circuit defects | — | 2005-08-30 |