Issued Patents 2005
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979251 | Method and apparatus to add slurry to a polishing system | — | 2005-12-27 |
| 6971944 | Method and control system for improving CMP process by detecting and reacting to harmonic oscillation | Steven Reder, Bruce Whitefield | 2005-12-06 |
| D511564 | Faucet | — | 2005-11-15 |
| D511563 | Faucet | — | 2005-11-15 |
| 6943055 | Method and apparatus for detecting backside contamination during fabrication of a semiconductor wafer | George E. Bailey, Rennie Barber | 2005-09-13 |
| 6927177 | Chemical mechanical electropolishing system | Steven Reder | 2005-08-09 |
| 6917430 | Method to improve the control of source chemicals delivery by a carrier gas | Scott Whitney Gould | 2005-07-12 |
| 6898064 | System and method for optimizing the electrostatic removal of a workpiece from a chuck | Rennie Barber | 2005-05-24 |
| 6894762 | Dual source lithography for direct write application | George E. Bailey | 2005-05-17 |
| 6885436 | Optical error minimization in a semiconductor manufacturing apparatus | George E. Bailey | 2005-04-26 |
| 6874510 | Method to use a laser to perform the edge clean operation on a semiconductor wafer | Steven Reder, Rennie Barber | 2005-04-05 |
| 6869893 | Laminate low K film | Steven Reder, Rennie Barber | 2005-03-22 |
| 6866970 | Apparatus and method to improve the resolution of photolithography systems by improving the temperature stability of the reticle | George E. Bailey | 2005-03-15 |
| 6849936 | System and method for using film deposition techniques to provide an antenna within an integrated circuit package | Rennie Barber | 2005-02-01 |
| 6837967 | Method and apparatus for cleaning deposited films from the edge of a wafer | Steven Reder, Rennie Barber | 2005-01-04 |