Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6943055 | Method and apparatus for detecting backside contamination during fabrication of a semiconductor wafer | Michael Berman, Rennie Barber | 2005-09-13 |
| 6934929 | Method for improving OPC modeling | Travis Brist | 2005-08-23 |
| 6894762 | Dual source lithography for direct write application | Michael Berman | 2005-05-17 |
| 6885436 | Optical error minimization in a semiconductor manufacturing apparatus | Michael Berman | 2005-04-26 |
| 6866970 | Apparatus and method to improve the resolution of photolithography systems by improving the temperature stability of the reticle | Michael Berman | 2005-03-15 |