Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6971944 | Method and control system for improving CMP process by detecting and reacting to harmonic oscillation | Michael Berman, Bruce Whitefield | 2005-12-06 |
| 6927177 | Chemical mechanical electropolishing system | Michael Berman | 2005-08-09 |
| 6874510 | Method to use a laser to perform the edge clean operation on a semiconductor wafer | Michael Berman, Rennie Barber | 2005-04-05 |
| 6869893 | Laminate low K film | Michael Berman, Rennie Barber | 2005-03-22 |
| 6837967 | Method and apparatus for cleaning deposited films from the edge of a wafer | Michael Berman, Rennie Barber | 2005-01-04 |