Issued Patents 2005
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6950196 | Methods and systems for determining a thickness of a structure on a specimen and at least one additional property of the specimen | John Fielden, Ady Levy, Kyle Brown, Gary Bultman, Dan Wack | 2005-09-27 |
| 6946394 | Methods and systems for determining a characteristic of a layer formed on a specimen by a deposition process | John Fielden, Ady Levy, Kyle Brown, Gary Bultman, Dan Wack | 2005-09-20 |
| 6922236 | Systems and methods for simultaneous or sequential multi-perspective specimen defect inspection | Mehdi Vaez-Iravani, Stan Stokowski, Steven Biellak, Jamie M. Sullivan, Keith Wells | 2005-07-26 |
| 6919957 | Methods and systems for determining a critical dimension, a presence of defects, and a thin film characteristic of a specimen | Ady Levy, Kyle Brown, Gary Bultman, Dan Wack, John Fielden | 2005-07-19 |
| 6917419 | Methods and systems for determining flatness, a presence of defects, and a thin film characteristic of a specimen | John Fielden, Ady Levy, Kyle Brown, Gary Bultman, Dan Wack | 2005-07-12 |
| 6917433 | Methods and systems for determining a property of a specimen prior to, during, or subsequent to an etch process | Ady Levy, Kyle Brown, Gary Bultman, Dan Wack, John Fielden | 2005-07-12 |
| 6900892 | Parametric profiling using optical spectroscopic systems | Andrei V. Shchegrov, Anatoly Fabrikant | 2005-05-31 |
| 6891627 | Methods and systems for determining a critical dimension and overlay of a specimen | Ady Levy, Kyle Brown, Gary Bultman, Dan Wack, John Fielden | 2005-05-10 |
| 6891610 | Methods and systems for determining an implant characteristic and a presence of defects on a specimen | Ady Levy, Kyle Brown, Gary Bultman, Dan Wack, John Fielden | 2005-05-10 |
| 6888627 | Optical scanning system for surface inspection | Brian C. Leslie, Keith Wells | 2005-05-03 |
| 6867862 | System and method for characterizing three-dimensional structures | — | 2005-03-15 |