Issued Patents 2005
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979824 | Filtered e-beam inspection and review | Luca Grella | 2005-12-27 |
| 6979819 | Photoelectron emission microscope for wafer and reticle inspection | Matthew S. Marcus | 2005-12-27 |
| 6921672 | Test structures and methods for inspection of semiconductor integrated circuits | Akella V. S. Satya, Gustavo A. Pinto, Robert Long, Neil Richardson, Kurt H. Weiner +2 more | 2005-07-26 |
| 6903338 | Method and apparatus for reducing substrate edge effects in electron lenses | Marian Mankos | 2005-06-07 |
| 6897444 | Multi-pixel electron emission die-to-die inspection | — | 2005-05-24 |
| 6885000 | Method and apparatus to correct for stage motion in E-beam inspection | — | 2005-04-26 |
| 6872942 | High-speed inspection of flat substrates with underlying visible topology | — | 2005-03-29 |
| 6870172 | Maskless reflection electron beam projection lithography | Marian Mankos, Harald F. Hess, Kirk J. Bertsche | 2005-03-22 |
| 6867606 | Multiple directional scans of test structures on semiconductor integrated circuits | Gustavo A. Pinto, Brian C. Leslie, Akella V. S. Satya, Robert Long, David J. Walker | 2005-03-15 |
| 6858843 | Immersion objective lens for e-beam inspection | Marian Mankos | 2005-02-22 |
| 6841776 | Method and apparatus for high-speed inspection and review | — | 2005-01-11 |