Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6852635 | Method for bottomless deposition of barrier layers in integrated circuit metallization schemes | Alessandra Satta, Kai-Erik Elers, Ville Antero Saanila, Pekka Soininen, Suvi Haukka | 2005-02-08 |
| 6844266 | Anisotropic etching of organic-containing insulating layers | Ricardo A. Donaton, Michael Baklanov, Serge Vanhaelemeersch, Herbert Struyf, Marc Schaekers | 2005-01-18 |