Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6933225 | Graded thin films | Christiaan J. Werkhoven, Ivo Raaijmakers | 2005-08-23 |
| 6902763 | Method for depositing nanolaminate thin films on sensitive surfaces | Kai-Erik Elers, Ville Antero Saanila, Sari Johanna Kaipio, Pekka Soininen | 2005-06-07 |
| 6887795 | Method of growing electrical conductors | Pekka Soininen, Kai-Erik Elers | 2005-05-03 |
| 6863727 | Method of depositing transition metal nitride thin films | Kai-Erik Elers, Ville Antero Saanila, Sari Johanna Kaipio, Pekka Soininen | 2005-03-08 |
| 6858524 | Method of depositing barrier layer for metal gates | Hannu Huotari | 2005-02-22 |
| 6852635 | Method for bottomless deposition of barrier layers in integrated circuit metallization schemes | Alessandra Satta, Karen Maex, Kai-Erik Elers, Ville Antero Saanila, Pekka Soininen | 2005-02-08 |