Issued Patents 2005
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6962859 | Thin films and method of making them | Michael A. Todd | 2005-11-08 |
| 6957690 | Apparatus for thermal treatment of substrates | — | 2005-10-25 |
| 6936535 | Copper interconnect structure having stuffed diffusion barrier | Ki Bum Kim, Pekka Soininen | 2005-08-30 |
| 6933225 | Graded thin films | Christiaan J. Werkhoven, Suvi Haukka | 2005-08-23 |
| 6924463 | Pyrometer calibrated wafer temperature estimator | James Donald | 2005-08-02 |
| 6900877 | Semiconductor wafer position shift measurement and correction | — | 2005-05-31 |
| 6893507 | Self-centering wafer support system | Matthew G. Goodman, Loren Jacobs, Franciscus Bernardus Maria Van Bilsen, Michael J. Meyer, Eric Barrett | 2005-05-17 |
| 6861334 | Method of fabricating trench isolation structures for integrated circuits using atomic layer deposition | Pekka Soininen, Ernst H. A. Granneman | 2005-03-01 |