Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6893507 | Self-centering wafer support system | Ivo Raaijmakers, Loren Jacobs, Franciscus Bernardus Maria Van Bilsen, Michael J. Meyer, Eric Barrett | 2005-05-17 |
| 6879777 | Localized heating of substrates using optics | Tony Keeton, Ravinder Aggarwal, Mark Hawkins | 2005-04-12 |
| 6840767 | Susceptor pocket profile to improve process performance | — | 2005-01-11 |