Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6899145 | Front opening unified pod | — | 2005-05-31 |
| 6883250 | Non-contact cool-down station for wafers | Bob Haro | 2005-04-26 |
| 6883776 | Slit valve for a semiconductor processing system | Jim Kusbel, Jerry Davis | 2005-04-26 |
| 6879777 | Localized heating of substrates using optics | Matthew G. Goodman, Tony Keeton, Mark Hawkins | 2005-04-12 |