Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6879777 | Localized heating of substrates using optics | Matthew G. Goodman, Tony Keeton, Ravinder Aggarwal | 2005-04-12 |
| 6861321 | Method of loading a wafer onto a wafer holder to reduce thermal shock | Tony Keeton, Michael Stamp | 2005-03-01 |