Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6861334 | Method of fabricating trench isolation structures for integrated circuits using atomic layer deposition | Ivo Raaijmakers, Pekka Soininen | 2005-03-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6861334 | Method of fabricating trench isolation structures for integrated circuits using atomic layer deposition | Ivo Raaijmakers, Pekka Soininen | 2005-03-01 |