Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6902763 | Method for depositing nanolaminate thin films on sensitive surfaces | Kai-Erik Elers, Suvi Haukka, Sari Johanna Kaipio, Pekka Soininen | 2005-06-07 |
| 6863727 | Method of depositing transition metal nitride thin films | Kai-Erik Elers, Suvi Haukka, Sari Johanna Kaipio, Pekka Soininen | 2005-03-08 |
| 6852635 | Method for bottomless deposition of barrier layers in integrated circuit metallization schemes | Alessandra Satta, Karen Maex, Kai-Erik Elers, Pekka Soininen, Suvi Haukka | 2005-02-08 |