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Michael Baklanov

IV Interuniversitair Micro-Electronica Centrum Vzw: 1 patents #6 of 68Top 9%
Overall (2005): #139,359 of 245,428Top 60%
1
Patents 2005

Issued Patents 2005

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
6844266 Anisotropic etching of organic-containing insulating layers Karen Maex, Ricardo A. Donaton, Serge Vanhaelemeersch, Herbert Struyf, Marc Schaekers 2005-01-18