Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6974655 | Silicon resist for photolithography at short exposure wavelengths and process for making photoresists | Jörg Rottstegge, Christoph Hohle, Christian Eschbaumer, Wolf-Dieter Domke | 2005-12-13 |
| 6946236 | Negative resist process with simultaneous development and aromatization of resist structures | Jörg Rottstegge, Eberhard Kuhn, Christian Eschbaumer, Gertrud Falk | 2005-09-20 |
| 6899997 | Process for modifying resist structures and resist films from the aqueous phase | Siew Siew Yip, Jörg Rottstegge, Ernst-Christian Richter, Gertrud Falk, Kerstin Seibold +1 more | 2005-05-31 |
| 6893972 | Process for sidewall amplification of resist structures and for the production of structures having reduced structure size | Jörg Rottstegge, Eberhard Kuhn, Waltraud Herbst, Christian Eschbaumer, Christoph Hohle +1 more | 2005-05-17 |
| 6887653 | Method for structuring a photoresist layer | Ernst-Christian Richter | 2005-05-03 |
| 6841332 | Photoresist compound and method for structuring a photoresist layer | Gertrud Falk, Eberhard Kuehn, Ernst-Christian Richter | 2005-01-11 |