Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6899997 | Process for modifying resist structures and resist films from the aqueous phase | Jörg Rottstegge, Ernst-Christian Richter, Gertrud Falk, Michael Sebald, Kerstin Seibold +1 more | 2005-05-31 |