Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6946236 | Negative resist process with simultaneous development and aromatization of resist structures | Jörg Rottstegge, Christian Eschbaumer, Gertrud Falk, Michael Sebald | 2005-09-20 |
| 6893972 | Process for sidewall amplification of resist structures and for the production of structures having reduced structure size | Jörg Rottstegge, Waltraud Herbst, Christian Eschbaumer, Christoph Hohle, Gertrud Falk +1 more | 2005-05-17 |