Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6974655 | Silicon resist for photolithography at short exposure wavelengths and process for making photoresists | Jörg Rottstegge, Christoph Hohle, Michael Sebald, Wolf-Dieter Domke | 2005-12-13 |
| 6946236 | Negative resist process with simultaneous development and aromatization of resist structures | Jörg Rottstegge, Eberhard Kuhn, Gertrud Falk, Michael Sebald | 2005-09-20 |
| 6893972 | Process for sidewall amplification of resist structures and for the production of structures having reduced structure size | Jörg Rottstegge, Eberhard Kuhn, Waltraud Herbst, Christoph Hohle, Gertrud Falk +1 more | 2005-05-17 |